JPS6234635Y2 - - Google Patents
Info
- Publication number
- JPS6234635Y2 JPS6234635Y2 JP2428383U JP2428383U JPS6234635Y2 JP S6234635 Y2 JPS6234635 Y2 JP S6234635Y2 JP 2428383 U JP2428383 U JP 2428383U JP 2428383 U JP2428383 U JP 2428383U JP S6234635 Y2 JPS6234635 Y2 JP S6234635Y2
- Authority
- JP
- Japan
- Prior art keywords
- holding part
- glass plate
- fixed
- processing
- fixed holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 30
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 244000126211 Hericium coralloides Species 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2428383U JPS59131287U (ja) | 1983-02-23 | 1983-02-23 | ガラス板の処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2428383U JPS59131287U (ja) | 1983-02-23 | 1983-02-23 | ガラス板の処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59131287U JPS59131287U (ja) | 1984-09-03 |
| JPS6234635Y2 true JPS6234635Y2 (en]) | 1987-09-03 |
Family
ID=30155328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2428383U Granted JPS59131287U (ja) | 1983-02-23 | 1983-02-23 | ガラス板の処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59131287U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4965107B2 (ja) * | 2005-10-19 | 2012-07-04 | トヨタ自動車株式会社 | 燃料電池セパレータの製造方法 |
-
1983
- 1983-02-23 JP JP2428383U patent/JPS59131287U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59131287U (ja) | 1984-09-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3893869A (en) | Megasonic cleaning system | |
| KR970013088A (ko) | 폴리싱 장치 | |
| JPS6234635Y2 (en]) | ||
| JP2001096245A (ja) | 洗浄方法および洗浄装置 | |
| JP2003093978A (ja) | キャリヤプレートの洗浄方法及び装置 | |
| JPH07161670A (ja) | ウェーハハンドリング装置 | |
| JPS63208223A (ja) | ウエハ処理装置 | |
| JP3302484B2 (ja) | めっき方法 | |
| JPS6317248Y2 (en]) | ||
| SU1276380A1 (ru) | Устройство дл очистки мелких изделий | |
| JP3756237B2 (ja) | 薄箔保持装置および吊り下げ式薄箔保持装置 | |
| CN210523183U (zh) | 石英晶体载板清洗装置 | |
| JPH06252072A (ja) | 基板処理装置 | |
| JPH09206711A (ja) | 基板洗浄方法およびその装置 | |
| JPH0547724A (ja) | ウエーハのブラシ洗浄装置 | |
| JPH0562955A (ja) | 半導体洗浄装置及び半導体ウエハ保持装置 | |
| JPS60168580A (ja) | 基板洗浄装置 | |
| JP2549338Y2 (ja) | 半導体基板自動処理装置 | |
| JPH0234823Y2 (en]) | ||
| CN115400243A (zh) | 一种用于液体交互的电极夹持装置 | |
| JPS645245Y2 (en]) | ||
| JPS6347858Y2 (en]) | ||
| JPS6342858B2 (en]) | ||
| JPH0642784Y2 (ja) | 洗浄装置 | |
| JPH05190643A (ja) | 基板処理装置 |